Vol.1 No.4
Year: 2012
Issue: Aug-Oct
Title : Silicon Based MEMS Pressure
Sensor for Enhancing the Sensitivity and Linearity
Author Name : Maflin Shaby,
Vimala Juliet
Synopsis :
This paper presents a structural analysis
of MEMS Pressure sensor. The diaphragm of the Pressure was made of silicon.
Different diaphragm shape, pressure range, the positioning of resistors in the
diaphragm and the length and width of the resistors were considered during the
analysis. A simulation programs were developed to predict the sensitivity and
linearity behavior of the piezoresistive pressure sensor. The output response
of the pressure sensor was also found as a function of temperature and
pressure. The analysis showed that sensitivity and linearity are influenced by
diaphragm thickness and length of the sensing resistor.
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